The MNF cleanrooms and laboratories are closed until further notice due to the spread of the novel corona virus (COVID-19). Please check back here for updates.

About the Münster Nanofabrication Facility (MNF)

The Münster Nanofabrication Facility (MNF) is a Core Science Facility administrated by the University of Münster (WWU) and operates two cleanrooms in CeNTech and the Center for Soft Nanoscience (SoN).

A state-of-the-art machine park for advanced nanofabrication, the MNF is an internal service provider offering cleanroom laboratory space to an interdisciplinary research community of graduate students, postdocs and research associates in chemistry, physics and biology.

The initial cleanroom in CeNTech was completed in 2003 and serves a diverse research community in nanophysics, nanobiology, nanochemistry and materials science. Following the University's expanding presence in nanoscience, the original facility required significant upgrades to meet the needs of researchers and remain competitive with peer institutions. Through the approval of the SoN research program, the WWU received a multimillion euro investment including capital equipment upgrade, as well as several large instrument grants.

In 2017 the MNF expanded into brand new cleanroom facilities in the SoN building.

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Two new job openings at the MNF

Our young and ambitious scientific team at the SoN is looking for strong support in nanofabrication to facilitate top-level research. We are seeking self-motivated individuals with creative ideas and the drive to push our instruments to their limits:

Process engineer- Nanofabrication

Process engineer- Nanoanalytics


© Raith GmbH, Dortmund

VELION - A Novel FIB-SEM Nanofabrication Instrument Concept and its Applications in Nanoscale Science and Engineering 

With the new Raith VELION possible EBL instrumentation and FIBL applications in plasmonics and nanophotonics include:
  • plasmonic arrays and zero mode waveguides for sensing biological molecules    
  • solar absorber arrays    
  • color center creation by maskless ion implantation    
  • large area photonic structures in diamond    
  • and metallic metasurfaces. 
Additionally it's possible to apply Gallium or non-Gallium species, such as Silicon, Gold, Germanium, Lithium, Bismuth and clusters, and to use workflows to generate lamellas for transmission electron microscopy (TEM) analyses.

On March 5th, 2020, MNF scientists attended a presentation by Dr. Torsten Richter Product Manager, Raith GmbH, covering the above topics and more

Raith VELION at the MNF
Workshop flyer

Physicists demonstrate energy quantization in high-temperature superconductors / Study in "Nature Communications”

Energiequantisierung In Hochtemperatur-supraleitern
© Martin Wolff

Researchers working in the MNF demonstrate for the first time energy quantization in nanowires made of high-temperature superconductors- where the temperature is brought to the level below which quantum mechanical effects predominate. The results are published in the journal "Nature Communications."

WWU News

Arrival of the Raith Velion FIB-SEM

Raith Velion Fib-sem

The new Si-Au focused ion beam and electron microscope was delivered on December 9th and is currently being installed in the SoN Velion zone (room 100.045).

We are excited to start working with this new multi-functional system beginning in the middle of March 2020.

Introducing GDSHelpers!

© Helge Gehring, Matthias Blaicher, Martin Wolff, Robin Stegmüller, Thomas Grottke, Anna Ovvyan, Wladick Hartmann, Wolfram Pernice

GDSHelpers is a Python-based, easy-to-learn, open-source software package, which allows users to quickly generate arbitrary photonic and other devices. Users can automate pattern generation for nano-structuring and export patterns in GDSII- and OASIS-format (for describing 2D-masks). Currently, the focus is mainly on photonic and superconducting circuitry.

The Python library GDSHelpers holds a growing list of parts, which can be composed into larger circuits.

Python based open source design framework forintegrated nanophotonic and superconductingcircuitry with 2D-3D-hybrid integration.
OSA Continuum
Vol. 2, No. 11 /15 November 2019

Physicists couple key components of quantum technologies

© J. Olthaus, P. Schrinner et al./Adv. Quantum Technol.

Researchers at the University of Münster have now developed an interface that couples light sources for single photons with nanophotonic networks. This interface consists of so-called photonic crystals, i.e. nanostructured dielectric materials that can enhance a certain wavelength range when light passes through. Such photonic crystals are used in many areas of research, but they had not previously been optimized for this type of interface. The researchers took particular care to achieve this feat in a way that allows for replicating the photonic crystals straightforwardly by using established nanofabrication processes.

WWU News

TERA-Fab™ E Series

Terraprint E-series
© Terraprint

The TERA-Fab™ E series is the world’s first beam pen lithography (BPL) tool, which provides the user with a way to prototype functional electronic devices, perform highly-localized photochemistry relevant to biology and medicine, and make the types of architectures traditionally made with photolithography, but in a mask-free fashion and with a diffraction-unlimited, sub-250 nm resolutions. With the E series, the user can rapidly create nanopatterns of any design across square micrometer to tens of square millimeter areas using a wide range of photosensitive materials.

On the 6th of November 2019, MNF scientists had the opportunity to learn more about the TERA-Fab™ E series from Dr. Andrey Ivankin, the chief technology officer and co-founder at TERA-print.

Seminar details

Molecular Printing in Nanotechnology

Molecular Printing Workshop

The new state-of-the art molecular printer installed in the Münster Nanofabricaton Facility (MNF) addresses the needs of users working in various fields of nanoscience ranging from biomedicine, material sciences to microelectronics. Allowing for flexible choice and combination of various functional modules, it can cover a wide range of applications and research projects, and has the following features:

  • Base printing module with a choice of different printing technologies (ranging from cantilever arrays and soft polymeric stamps to microcapillary pens)
  • High-Resolution module for increased patterning control down to the low nanoscale
  • Climate module for controlled humidity
  • Optical module for in-situ process control and analysis.

On the 4th and 5th of November 2019, MNF scientists participated in a workshop to learn more about this exciting new technology.

Workshop Details
Workshop Agenda

Crossbeam installed


The new Zeiss Crossbeam 340 in the Center for Soft Nanoscience (SoN) is ready for use. It comes with Gemini I electron and Gallium Ion Sculptor columns and multi GIS.

More about the Crossbeam

Sputtering system and probe station


The sputtering system is currently installed in CeNTech can be used for thin film deposition!

More about the sputtering system