About the Münster Nanofabrication Facility (MNF)

VELION - A Novel FIB-SEM Nanofabrication Instrument Concept and its Applications in Nanoscale Science and Engineering 

• plasmonic arrays and zero mode waveguides for sensing biological molecules    
• solar absorber arrays    
• color center creation by maskless ion implantation    
• large area photonic structures in diamond    
• and metallic metasurfaces. 

On March 5th, 2020, MNF scientists attended a presentation by Dr. Torsten Richter Product Manager, Raith GmbH, covering the above topics and more

Raith VELION at the MNF
Workshop flyer

Researchers working in the MNF demonstrate for the first time energy quantization in nanowires made of high-temperature superconductors- where the temperature is brought to the level below which quantum mechanical effects predominate. The results are published in the journal "Nature Communications."

WWU News

The new Si-Au focused ion beam and electron microscope was delivered on December 9th and is currently being installed in the SoN Velion zone (room 100.045).

We are excited to start working with this new multi-functional system beginning in the middle of March 2020.

GDSHelpers is a Python-based, easy-to-learn, open-source software package, which allows users to quickly generate arbitrary photonic and other devices. Users can automate pattern generation for nano-structuring and export patterns in GDSII- and OASIS-format (for describing 2D-masks). Currently, the focus is mainly on photonic and superconducting circuitry.

The Python library GDSHelpers holds a growing list of parts, which can be composed into larger circuits.

Python based open source design framework forintegrated nanophotonic and superconductingcircuitry with 2D-3D-hybrid integration.
OSA Continuum Vol. 2, No. 11 /15 November 2019

Researchers at the University of Münster have now developed an interface that couples light sources for single photons with nanophotonic networks. This interface consists of so-called photonic crystals, i.e. nanostructured dielectric materials that can enhance a certain wavelength range when light passes through. Such photonic crystals are used in many areas of research, but they had not previously been optimized for this type of interface. The researchers took particular care to achieve this feat in a way that allows for replicating the photonic crystals straightforwardly by using established nanofabrication processes.

WWU News

The TERA-Fab™ E series is the world’s first beam pen lithography (BPL) tool, which provides the user with a way to prototype functional electronic devices, perform highly-localized photochemistry relevant to biology and medicine, and make the types of architectures traditionally made with photolithography, but in a mask-free fashion and with a diffraction-unlimited, sub-250 nm resolutions. With the E series, the user can rapidly create nanopatterns of any design across square micrometer to tens of square millimeter areas using a wide range of photosensitive materials.

On the 6th of November 2019, MNF scientists had the opportunity to learn more about the TERA-Fab™ E series from Dr. Andrey Ivankin, the chief technology officer and co-founder at TERA-print.

The new state-of-the art molecular printer installed in the Münster Nanofabricaton Facility (MNF) addresses the needs of users working in various fields of nanoscience ranging from biomedicine, material sciences to microelectronics. Allowing for flexible choice and combination of various functional modules, it can cover a wide range of applications and research projects, and has the following features:

• Base printing module with a choice of different printing technologies (ranging from cantilever arrays and soft polymeric stamps to microcapillary pens)
• High-Resolution module for increased patterning control down to the low nanoscale
• Climate module for controlled humidity
• Optical module for in-situ process control and analysis.

On the 4th and 5th of November 2019, MNF scientists participated in a workshop to learn more about this exciting new technology.

The new Zeiss Crossbeam 340 in the Center for Soft Nanoscience (SoN) is ready for use. It comes with Gemini I electron and Gallium Ion Sculptor columns and multi GIS.

More about the Crossbeam

The sputtering system is currently installed in CeNTech can be used for thin film deposition!

More about the sputtering system