AFM

Park Systems XE-100

Decoupled X-Y and Z scanners to suppress image distortion

Measurement of nanoindents, scanning of surface roughness, Scanning Spreading Resistance Microscopy, Kelvin Probe Microscopy

Keithley 4200 SCS

• Recording of CV and IV characteristics (capacitance-voltage unit 4200 CVU & two DC source-measure units 4200 SMU)
• digital storage oscilloscope (SCP2)
• Pulse generator 4205 PG

Potentiostat/Galvanostat with corrosion measuring cell

Metrohm Autolab PGSTAT128N

Modules for impedance spectroscopy and temperature measurements / pH measurements

Electrochemical corrosion investigations

Spreading Resistance Profiler
ASR - 100B 

SOLID STATE MEASUREMENT INC

Depth-resolved two-probe resistivity measurement to determine dopant profiles in semiconductors

Hydrogen passivation

Generation of a hydrogen plasma to passivate electrically active imperfections on semiconductor interfaces at variable temperatures

Irradiation holder F-ION A
Self-construction of the institute workshop

Graphite holder
Boron nitride heating plate controlled by internal thermocouple using Tectra PID controller.

Simultaneous heating up to max. 850°C and irradiation with protons in the MeV range, at max 3µA

Low-temperature measuring cell with closed cycle cryostat

Allows electrical measurements at temperatures between 20 K and room temperature (e.g. characterization of deep defects using DLTS)

High temperature furnace

High temperature diffusion experiments in SiC

Flow Furnace with mass spectrometer

Annealing invariable gas atmospheres
Gas analysis using a mass spectrometer

Ten-zone oven