Institut für Materialphysik	Tel. (0251) 83-33571 Fax: (0251) 83-38346 e-mail: epped@uni-muenster.de www: uni-muenster.de/Physik/MP/
Wilhelm-Klemm-Str. 10 48149 Münster Direktor: Prof. Dr. Helmut Mehrer
Forschungsschwerpunkte 2003 - 2004    zurück    weiter

Diffusion and Defects in Elementary and Compound Semiconductors Interference between self- and dopant diffusion in silicon isotope multilayer structures   This research topic concerns the simultaneous diffusion of self- and dopant atoms in silicon. Experiments on boron, arsenic and phosphorus diffusion in silicon isotope multilayer structures have been performed at temperatures between 850oC and 1100oC. Modelling of the simultaneous diffusion yields valuable information about the underlying mechanisms of dopant- and self-diffusion. Our experiments provide direct evidence that boron diffusion is mediated by neutral and singly positively charged self-interstitials. Simultaneous modelling of boron and silicon profiles yields data for the contributions of neutral and positively charged self-interstitials to self-diffusion. The simultaneous diffusion of arsenic and silicon reveals that neutral and singly negatively charged native defects mediate arsenic diffusion; no evidence of doubly charged defects was found. Detailed modeling of phosphorus diffusion in silicon isotope multilayer structures was achieved on the basis of a P diffusion model which involves neutral and positively charged mobile P species and neutral and singly negatively charged native defects. Drittmittelgeber: Alexander von Humboldt Foundation, State of California under the UC-SMART program, US National Science Foundation Beteiligte Wissenschaftler: HDoz. Dr. H. Bracht (project leader) Prof. Dr. E.E. Haller, Ian Sharp, Hughes Silvestri (Lawrence Berkeley National Laboratory and University of California at Berkeley, USA) Dr. J. Lundsgaard Hansen, Prof. Dr. A. Nylandsted Larsen (Institute of Physics and Astronomy, University of Aarhus, Denmark) Veröffentlichungen: H. Bracht, H.H. Silvestri, I.D. Sharp, S.P. Nicols, J.W. Beeman, J.L. Hansen, A. Nylandsted Larsen, E.E. Haller: Self- and dopant diffusion in Si isotope multilayer structures Proceedings of the 26th International Conference on Physics of Semiconductors (Edinburgh, 2002) Inst. Phys. Conf. Ser. 171 (2003) C3.8 H.H. Silvestri, H. Bracht, I.D. Sharp, J.Lundsgaard Hansen, A. Nylandsted Larsen, E.E. Haller: Simultaneous Phosphorus and Si Self-Diffusion in Extrinsic Isotopically Controlled Silicon Heterostructures Mater. Res. Soc. Symp. Proc. 810 (2004) C3.3.1-C3.3.7 H.H. Silvestri: Diffusion in Silicon Isotope Heterostructures Ph.D. Thesis, University of California at Berkeley, U.S.A. 2004