Westfälische Wilhelms-Universität Münster

- Fachbereich Physik -

ALLGEMEINES PHYSIKALISCHES KOLLOQUIUM

Mittwoch, 21. Januar 1998

Prof. Dr. P. Kruit

Delft University of Technology

New Directions in Very High Resolution

Analytical Electron Microscopy

Sub nanometer resolution analytical microscopy can be advanced by innovations in three different areas. First of all, it is still possible to improve the spatial resolution of existing methods, either by traditional means such as smaller aberrations and disturbances or by revolutionary means such as aberration correction or standing wave illumination. At these levels of resolution it is important to pay as much attention to the microscope alignment and the electronwave-specimen interaction as in high resolution transmission electron microscopy. Then, existing methods of microanalysis can be developed further, either by increasing the detection efficiency or by enhancing the spectral resolution. Electron energy loss Spectroscopy (EELS) seems to fit best with very high spatial resolution, but much can be gained in terms of energy resolution. It is time to decrease the energy spread of the primary beam such that an EELS resolution of about 50-100 meV can be obtained for high resolution chemical shift measurements. Finally, as the third area of innovation, new information channels can be explored. A start has been made on adding Auger spectroscopy and Auger-EELS coincidence spectroscopy to the STEM, but much work still has to be performed before that can be as standard as X-ray analysis or EELS. Real innovations can come from new methods such as electron stimulated desorption. The presentation will concentrate on a discussion of necessary instrumental developments for examples in all three areas: standing wave illumination, monochromatization of the primary beam and efficient detection of coincidence spectra.

Ort: Wilhelm-Klemm-Str. 9, Hörsaal 404

Zeit: 17 Uhr c.t.

Einladender: Kohl